With the extended analysis, which is carried out through SEM/EDX electron microscopy, information is obtained on the chemical composition of the particles and, consequently, on their possible origin.
Extended analysis is applied in the field of process optimization and root cause investigation to obtain complementary information on the origin of particles.
SEM/EDX analysis is a combined analysis technique that counts and measures particles using a scanning electron microscope (SEM) and determines their material composition using energy dispersive X-ray spectroscopy (EDX).
By assigning the particles and their size to specific material classes, complementary information about their potential for damage or possible source of origin can be obtained.